Physical Vapor Deposition Module – PVM
The PVM is a filament evaporator that will also accept a wide variety of boats. There is also a sputter system available – please see the PV Ultra page in this site.
This system is VERY user friendly and will allow the reliable deposition of any material with a melting point below about 1500°C. In the Modu-Lab process, it is used to deposit the contacts and interconnects of the device(s) in process.
The Module features:
Fully Interlocked Electrical System
Stainless Steel Vacuum Hardware
110 or 220 VAC
3.2 CFM Mechanical / Turbomolecular Pump Package
1 Year Warranty
Interlocked Control for Vacuum Training
Low Cost of Ownership
Low Voltage Tungsten Source
Full Range Instrumentation
Metalized substrates coated on Modu-Lab PVM